AMEC's World's First High-Selectivity Etch Equipment Successfully Shipped

Recently, AMEC announced that the world's first Primo Domingo gas-phase high-selectivity etching system has been successfully shipped to an important domestic integrated circuit R&D and manufacturing customer. The three-dimensionalization of chip architectures is becoming an important driving force supporting the continued scaling of chips, and high-selectivity etching processes are one of the most critical processes in 3D device manufacturing. In response to the process requirements of devices such as GAA, 3D NAND, and 3D DRAM, AMEC's important breakthrough in the field of high-selectivity etching equipment has filled the domestic gap in independent development of key etching processes for next-generation 3D semiconductor device manufacturing.