ASML: Intel Achieves High-NA EUV High Numerical Aperture Lithography Mass Production Application

On July 15th, ASML announced that Intel has successfully mass-produced a portion of its Intel Core Ultra Series 3 processors using ASML's high numerical aperture extreme ultraviolet lithography (EUV) technology on Intel's 18A process node. This makes ASML the first company in the world to achieve high-volume shipments of High NA EUV logic chips. Both parties stated that certain layers of Intel 18A process have completed High NA EUV double certification, with product yield reaching the level of the existing NXE EUV platform, and will continue to advance the application of this technology in future process nodes.