Koma Technology: The 12-inch electrostatic chuck has been verified and achieved small-scale production.

Koma Technology expressed on the interactive platform on November 12 that the company's advanced ceramics are mainly used in front-end process equipment for wafer manufacturing. Currently, they have entered into a variety of equipment such as etching, thin film deposition, ion implantation, lithography, and oxide diffusion. As of now, the company's 12-inch electrostatic chuck has been validated and achieved small-scale production, and the development of the 12-inch multi-zone heating electrostatic chuck has been completed. The company is actively pushing forward with its validation process.